Krypton sputtering is found to promote the synthesis of body-centred-cubic tantalum films on silicon at temperatures as low as 200 °C, compatible with back-end-of-line fabrication standards. Superconducting qubits based on these thin films exhibit excellent p…
Awschalom, D. D., Bernien, H., Hanson, R., Oliver, W. D. & Vukovi, J. Challenges and opportunities for quantum information hardware. Science390, 10041010 (2025).
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